Plasma Ashing System
- Údarás conarthach
- Walther-Meissner-Institut der Bayerischen Akademie der Wissenschaften (Garching)
- Suíomh
- Garching, An Ghearmáin
- Cineál fógra
- can-standard
- Cineál conartha
- Soláthairtí
- Nós imeachta
- open
- Foilsithe
- 23 DFómh 2026
- Catagóir CPV
- 38000000 Laboratory, optical and precision equipments (excl. glasses)
Cur síos
The Walther-Meissner-Institute (WMI) will acquire a plasma ashing system for the fabrication of integrated quantum circuits. The system should be capable of ashing and descumming of photo resist on 200 mm wafers with high uniformity. The plasma ashing system shall be turnkey ready, i.e., fully equipped with all necessary components, control electronics, and software. The system shall be ready for automated operation, i.e., the hardware components have to be equipped with appropriate interfaces for computer connection.
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