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Elektronenstrahllithografie

Contracting authority
Freistaat Bayern, vertreten durch die Universität Erlangen-Nürnberg (Erlangen)
Location
Erlangen, Germany
Notice type
cn-standard
Contract type
Supplies
Procedure
open
Published
Oct 22, 2026
Submission deadline
Nov 23, 2026, 10:59 PM UTC
CPV category
38511100 Scanning electron microscopes

Description

Gegenstand der Beschaffung ist ein Elektronenstrahllithografie-System (EBL) mit integrierten Funktionen zur Rasterelektronenmikroskopie (REM).

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Original language: German. The text above is the original notice.

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Germany – Scanning electron microscopes – Elektronenstrahllithografie

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