Mogħtija Avviż pubbliku uffiċjali

Plasma Ashing System

Awtorità kontraenti
Walther-Meissner-Institut der Bayerischen Akademie der Wissenschaften (Garching)
Post
Garching, Il-Ġermanja
Tip ta' avviż
can-standard
Tip ta' kuntratt
Provvisti
Proċedura
open
Ippubblikat
23 Ott 2026
Kategorija CPV
38000000 Tagħmir tal-laboratorju, ottiku u ta' preċiżjoni (minbarra nuċċalijiet)

Deskrizzjoni

The Walther-Meissner-Institute (WMI) will acquire a plasma ashing system for the fabrication of integrated quantum circuits. The system should be capable of ashing and descumming of photo resist on 200 mm wafers with high uniformity. The plasma ashing system shall be turnkey ready, i.e., fully equipped with all necessary components, control electronics, and software. The system shall be ready for automated operation, i.e., the hardware components have to be equipped with appropriate interfaces for computer connection.

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